List of I.P for sale
Intellectual property
| Domestic or overseas | Domestic | Form of the I.P | Patent |
|---|---|---|---|
| Patent no. | US 17/771,550 | Registration no. | 12,139,785 |
| Name of the invention | METHOD FOR FORMING COATING LAYER HAVING PLASMA RESISTANCE | ||
| Name of the invention(English) | METHOD FOR FORMING COATING LAYER HAVING PLASMA RESISTANCE | ||
| I.P sector | Chemical | ||
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| Patent evaluation rating | Patent evaluation score | ||
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Commercialization information
| I.P Abstract & Summary | The present invention relates to a method of forming a coating layer having plasma resistance, the method comprising steps of: preparing a substrate by placing the substrate in a substrate fixing device inside a process chamber; evaporating a Y.sub.2O.sub.3 deposition material provided in a solid form in an electron beam source by irradiating an electron beam on the Y.sub.2O.sub.3 deposition material; generating radical particles having activation energy by injecting a process gas containing oxygen for forming radicals into a RF energy beam source; irradiating an RF energy beam including the radical particles generated in the RF energy beam source, toward the substrate; depositing a thin film in which the evaporated deposition material is deposited on the substrate by being assisted by the RF energy beam, and densifying the thin film in which the deposition material deposited on the substrate forms a densified film by ion bombardment of the RF energy beam. |
|---|---|
| Trade type of the I.P | Rights transfer ( Consultation ) |
| Decide after agreement | |
| I.P stage | R&D completed |
#FORMING COATING LAYER, #PLASMA RESISTANCE
