List of I.P for sale
Intellectual property
| Domestic or overseas | Domestic | Form of the I.P | Patent |
|---|---|---|---|
| Patent no. | US 17/726,729 | Registration no. | 11,618,948 |
| Name of the invention | METHOD OF FORMING COATING LAYER OF WHICH COMPOSITION CAN BE CONTROLLED | ||
| Name of the invention(English) | METHOD OF FORMING COATING LAYER OF WHICH COMPOSITION CAN BE CONTROLLED | ||
| I.P sector | Chemical | ||
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| Patent evaluation rating | Patent evaluation score | ||
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Commercialization information
| I.P Abstract & Summary | The present invention relates to a method of forming a coating layer of which a composition can be controlled, the method comprising steps of: preparing a substrate inside a chamber; evaporating a deposition material to generate YF.sub.3 or YOF particles in a gas phase by irradiating an electron beam on a YF.sub.3 deposition material provided in a solid form in an electron beam source; generating radical particles having activation energy by injecting a process gas containing oxygen into a RF energy beam source; irradiating an RF energy beam including oxygen radical particles toward the substrate; controlling a composition of a thin film by generating YOF deposition particles having a modified atomic ratio by adjusting an amount of fluorine substitution by oxygen as the YF.sub.3 or YOF particles and the oxygen radical particles react, and depositing the YOF deposition particles on the substrate with the RF energy beam. |
|---|---|
| Trade type of the I.P | Rights transfer ( Consultation ) |
| Decide after agreement | |
| I.P stage | Idea stage |
#FORMING COATING LAYER, #WHICH COMPOSITION, #CAN BE CONTROLLED
