List of I.P for sale
Intellectual property
| Domestic or overseas | Domestic | Form of the I.P | Patent |
|---|---|---|---|
| Patent no. | US 16/581,922 | Registration no. | 11,359,968 |
| Name of the invention | APPARATUS AND METHOD FOR ADJUSTING INSTALLATION LOCATION OF TEMPERATURE SENSOR CONFIGURED TO MEASURE | ||
| Name of the invention(English) | APPARATUS AND METHOD FOR ADJUSTING INSTALLATION LOCATION OF TEMPERATURE SENSOR CONFIGURED TO MEASURE | ||
| I.P sector | Electronics | ||
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| Patent evaluation rating | Patent evaluation score | ||
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Commercialization information
| I.P Abstract & Summary | Disclosed herein is an apparatus for adjusting the installation location of a temperature sensor configured to measure the surface temperature of a wafer in a semiconductor wafer cleaning apparatus. The apparatus includes: a bracket which is disposed in the upper end of the side wall of each of multi-station processing chambers (MPCs); a first fastening member which fastens a cable; a second fastening member which fastens a temperature sensor; a location adjustment member which fastens and supports the temperature sensor; the temperature sensor which is fixedly coupled to an end of the location adjustment member; a jig which includes a location adjustment plate and a control substrate, and which adjusts the detection location of the temperature sensor; and a controller which is provided with a wafer surface monitoring system configured to separate the surface temperature into a plurality of channels and to display the surface temperature. |
|---|---|
| Trade type of the I.P | Rights transfer ( Consultation ) |
| Decide after agreement | |
| I.P stage | R&D stage |
#TEMPERATURE SENSOR, #SURFACE TEMPERATURE OF WAFER, #SEMICONDUCTOR WAFER CLEANING APPARATUS, #ADJUSTING INSTALLATION LOCATION
